Mechanical manipulator automatically loads, transports, and unloads silicon wafers between processing stations in large-scale integrated-circuit fabrication facility at Marshall Space Flight Center thus eliminating need for human opeators at various stages in processing cycle. It also reduces possibility of wafer contamination.
Remote manipulator for IC wafers
NASA Tech Briefs ; 4 , 1
1979-08-01
Miscellaneous
No indication
English
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