Two instrumentation systems are used to measure scatter angle: intensity scatterometer makes small angle measurements on order of 10 arc-minutes; amplitude scatterometer, which uses interferometric principle, measures smaller angles on order of 10 arc-seconds. Both scatterometers use laser sources and can measure into ultraviolet (0.325 micron) wavelengths.


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    Title :

    Measuring scatter angle from mirrors


    Published in:

    Publication date :

    1977-01-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English