A multi-beam LTP is under development at MSFC in collaboration with Lawrence Berkeley National laboratory and Brookhaven National Laboratory. The Multi-beam LTP has been fully assembled. First tests of the MBLTP has demonstrated the feasibility of the multibeam approach. The calibrations are under way. The MBLTP is intended to be used for metrology support of the deterministic polishing experiments.


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    Title :

    Status of Multi-Beam Long Trace- Profiler Development


    Contributors:
    V.M Gubarev (author) / K Kilaru (author) / J.D Merthe (author) / T Kester (author) / R.W McKinney (author) / Z.P Takacs (author) / R Eng (author) / A Dahir (author) / V.V Yashchuk (author)

    Publication date :

    2013


    Size :

    10 pages


    Type of media :

    Report


    Type of material :

    No indication


    Language :

    English




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    Qian, S. / Takacs, P. Z. / SPIE | British Library Conference Proceedings | 1999