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    Title :

    Micro-optical structures realized by LIGA technology


    Contributors:
    Gerner, M. (author) / Schift, H. (author) / Bauer, H.D. (author) / Ehrfeld, W. (author)


    Publication date :

    1994-01-01


    Size :

    165531 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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