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    Title :

    Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences


    Contributors:
    Schift, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 1773-1781


    Publication date :

    2014-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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