Summary form only given. We have fabricated integrated resonated cavity photodetectors with selectively oxidized VCSELs by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm VCSEL lasers.
Monolithically integrated VCSELs and photodetectors for microsystem applications
1998-01-01
278480 byte
Conference paper
Electronic Resource
English
Monolithically Integrated VCSELs and Photodetectors for Microsystem Applications
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