Summary form only given. We have fabricated integrated resonated cavity photodetectors with selectively oxidized VCSELs by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm VCSEL lasers.
Monolithically integrated VCSELs and photodetectors for microsystem applications
01.01.1998
278480 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Monolithically Integrated VCSELs and Photodetectors for Microsystem Applications
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