Vertical cavity surface emitting lasers (VCSEL) have developed rapidly during the past few years. However, most of the device fabrication processes are highly complex. Recently, we designed and fabricated a new structure of the vertical-cavity top surface-emitting laser by dual implantation using a tungsten wire as the mask. This simplifies the fabrication process.
Top surface-emitting laser fabricated by dual implantation using tungsten wire as a mask
Proceedings of LEOS'94 ; 1 ; 258 vol.1
1994-01-01
91804 byte
Conference paper
Electronic Resource
English
Top Surface-Emitting Laser Fabricated by Twice Implantations Using Tungsten Wire as Mask
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