Vertical cavity surface emitting lasers (VCSEL) have developed rapidly during the past few years. However, most of the device fabrication processes are highly complex. Recently, we designed and fabricated a new structure of the vertical-cavity top surface-emitting laser by dual implantation using a tungsten wire as the mask. This simplifies the fabrication process.


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    Title :

    Top surface-emitting laser fabricated by dual implantation using tungsten wire as a mask


    Contributors:
    Du, G. (author) / Lin, X. (author) / Jiang, X. (author) / Gao, D. (author)

    Published in:

    Proceedings of LEOS'94 ; 1 ; 258 vol.1


    Publication date :

    1994-01-01


    Size :

    91804 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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