Vertical cavity surface emitting lasers (VCSEL) have developed rapidly during the past few years. However, most of the device fabrication processes are highly complex. Recently, we designed and fabricated a new structure of the vertical-cavity top surface-emitting laser by dual implantation using a tungsten wire as the mask. This simplifies the fabrication process.


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    Titel :

    Top surface-emitting laser fabricated by dual implantation using tungsten wire as a mask


    Beteiligte:
    Du, G. (Autor:in) / Lin, X. (Autor:in) / Jiang, X. (Autor:in) / Gao, D. (Autor:in)

    Erschienen in:

    Proceedings of LEOS'94 ; 1 ; 258 vol.1


    Erscheinungsdatum :

    01.01.1994


    Format / Umfang :

    91804 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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