We investigated the difference between CBE and MOCVD grown GaInNAs. Photoluminescence characteristics showed similar tendency, while there are large differences in the nitrogen incorporation characteristics. Hydrogen in the nitrogen source may play an important role. Further improvement of GaInNAs quality will be achieved by clarifying the details of growth characteristics and mechanisms.
Comparison of GaInNAs grown by MOCVD and CBE
1998-01-01
161640 byte
Conference paper
Electronic Resource
English
Comparison of GaInNAs Grown by MOCVD and CBE
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