It is necessary to establish the fabrication techniques of high quality BaTiO/sub 3/ thin films. In the present work, the laser annealing technique was applied to crystallize amorphous BaTiO/sub 3/ thin films deposited by KrTiO/sub 3/ laser ablation at room temperature, and the effect of pulsed excimer laser annealing on BaTiO/sub 3/ thin films was investigated for the first time.


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    Title :

    Polycrystallization of pulsed laser deposited BaTiO/sub 3/ thin films at room temperature by KrF laser annealing


    Contributors:
    Tomita, H. (author) / Ninomiya, Y. (author) / Ito, A. (author) / Obara, M. (author)


    Publication date :

    1995-01-01


    Size :

    200412 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Polycrystallization of Pulsed Laser Deposited BaTiO3 Thin Films at Room Temperature by KrF Laser Annealing

    IEEE / Lasers and Electro-Optics Society | British Library Conference Proceedings | 1995




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