It is necessary to establish the fabrication techniques of high quality BaTiO/sub 3/ thin films. In the present work, the laser annealing technique was applied to crystallize amorphous BaTiO/sub 3/ thin films deposited by KrTiO/sub 3/ laser ablation at room temperature, and the effect of pulsed excimer laser annealing on BaTiO/sub 3/ thin films was investigated for the first time.


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    Titel :

    Polycrystallization of pulsed laser deposited BaTiO/sub 3/ thin films at room temperature by KrF laser annealing


    Beteiligte:
    Tomita, H. (Autor:in) / Ninomiya, Y. (Autor:in) / Ito, A. (Autor:in) / Obara, M. (Autor:in)


    Erscheinungsdatum :

    01.01.1995


    Format / Umfang :

    200412 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Polycrystallization of Pulsed Laser Deposited BaTiO3 Thin Films at Room Temperature by KrF Laser Annealing

    IEEE / Lasers and Electro-Optics Society | British Library Conference Proceedings | 1995




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    Dinu, R. / Vrejoiu, I. / Verardi, P. et al. | British Library Conference Proceedings | 2001