In tihs paper, we present a method for an one step fabrication process of micro-optical elements in quartz by combining laser induced backside wet etching (LIBWE) and a simple projection method. Micro-optical elements in quartz with continuous structure profiles (e.g. beam homogenizers for high power lasers) are usually fabricated by photolithography, and subsequent transfer of the resist profile into quartz by reactive ion etching.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Laser micromachining: fabrication of optical elements in quartz


    Contributors:
    Kopitkovas, G. (author) / Lippert, T. (author) / David, C. (author) / Wokaun, A. (author) / Gobrecht, J. (author)


    Publication date :

    2003-01-01


    Size :

    69733 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    A Galvanometer Using Quartz Micromachining

    Sugiyama, N. / Yamazaki, D. / Ueda, T. | British Library Online Contents | 1993


    Laser micromachining

    Online Contents | 1995


    Laser Micromachining

    Von Alvensleben, F. / Gonschior, M. / Kappel, H. et al. | British Library Online Contents | 1995


    Fabrication of metallic micromolds by laser and electro-discharge micromachining

    Shiu, P. P. / Knopf, G. K. / Ostojic, M. | British Library Online Contents | 2010


    Fabrication of waveguide-based vibration sensors by femtosecond laser micromachining

    Kamata, M. / Obara, M. / Gattass, R.R. et al. | IEEE | 2005