In tihs paper, we present a method for an one step fabrication process of micro-optical elements in quartz by combining laser induced backside wet etching (LIBWE) and a simple projection method. Micro-optical elements in quartz with continuous structure profiles (e.g. beam homogenizers for high power lasers) are usually fabricated by photolithography, and subsequent transfer of the resist profile into quartz by reactive ion etching.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Laser micromachining: fabrication of optical elements in quartz


    Beteiligte:
    Kopitkovas, G. (Autor:in) / Lippert, T. (Autor:in) / David, C. (Autor:in) / Wokaun, A. (Autor:in) / Gobrecht, J. (Autor:in)


    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    69733 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    A Galvanometer Using Quartz Micromachining

    Sugiyama, N. / Yamazaki, D. / Ueda, T. | British Library Online Contents | 1993


    Laser micromachining

    Online Contents | 1995


    Laser Micromachining

    Von Alvensleben, F. / Gonschior, M. / Kappel, H. et al. | British Library Online Contents | 1995


    Laser micromachining of optical biochips [6459-08]

    Goater, A. D. / Burt, J. P. H. / Morris, D. J. et al. | British Library Conference Proceedings | 2007


    Fabrication of Waveguide-Based Vibration Sensors by Femtosecond Laser Micromachining

    Kamata, M. | British Library Conference Proceedings | 2005