Summary form only given. We report a novel scheme for optoelectronic packaging using surface micro-machining technique. Free space micro-optical benches (MOB) enable a large optical system to be monolithically integrated on a small Si chip. In this paper, we present a novel rotatable micro-mirror, and a three dimensional self-alignment structure for integrating active optical components such as semiconductor lasers or isolators on MOB.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micro-machined micro-optical bench for optoelectronic packaging


    Contributors:
    Lin, L.Y. (author) / Lee, S.S. (author) / Pister, K.S.J. (author) / Wu, M.C. (author)

    Published in:

    Proceedings of LEOS'94 ; 1 ; 219-220 vol.1


    Publication date :

    1994-01-01


    Size :

    312266 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Micro-Machined Micro-Optical Bench for Optoelectronic Packaging

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1994


    A Novel Micro-Machined Valve-Less Micro-Pump

    Rahman, M. A. / Zhao, Y. / Aerospace Corporation | British Library Conference Proceedings | 1999


    Low cost navigation using micro-machined technology

    Randle, J.S. / Horton, M.A. | IEEE | 1997


    Micro machined sensors for measuring vehicle motion

    Meriheinä, U. | Tema Archive | 1996


    MMR (Micro Machined Relay) for Space Applications

    Sakata, M. / Komura, Y. / Seki, T. et al. | British Library Conference Proceedings | 1999