Summary form only given. We report a novel scheme for optoelectronic packaging using surface micro-machining technique. Free space micro-optical benches (MOB) enable a large optical system to be monolithically integrated on a small Si chip. In this paper, we present a novel rotatable micro-mirror, and a three dimensional self-alignment structure for integrating active optical components such as semiconductor lasers or isolators on MOB.
Micro-machined micro-optical bench for optoelectronic packaging
Proceedings of LEOS'94 ; 1 ; 219-220 vol.1
01.01.1994
312266 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Micro-Machined Micro-Optical Bench for Optoelectronic Packaging
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