Summary form only given. We report a novel scheme for optoelectronic packaging using surface micro-machining technique. Free space micro-optical benches (MOB) enable a large optical system to be monolithically integrated on a small Si chip. In this paper, we present a novel rotatable micro-mirror, and a three dimensional self-alignment structure for integrating active optical components such as semiconductor lasers or isolators on MOB.


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    Titel :

    Micro-machined micro-optical bench for optoelectronic packaging


    Beteiligte:
    Lin, L.Y. (Autor:in) / Lee, S.S. (Autor:in) / Pister, K.S.J. (Autor:in) / Wu, M.C. (Autor:in)

    Erschienen in:

    Proceedings of LEOS'94 ; 1 ; 219-220 vol.1


    Erscheinungsdatum :

    01.01.1994


    Format / Umfang :

    312266 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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