In this paper it has been shown that the excellent accuracy and reliability of the bulk silicon capacitive technology, proven in the field, have their origin in basic physical phenomena and the mechanical structures of the sensing elements. The simple structures and measurement principles give reliability and easy diagnostics, making this technology most suitable for highly demanding automotive safety critical applications. It has also been shown, that size reduction of the sensing element in the past and in the future give competitiveness in highly cost critical applications. The easy packaging technology results in low cost and small size components for automatic assembly on the customer's PCB. The features listed in this paper have made the silicon capacitive technology a dominant one in automotive applications.


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    Titel :

    Micro machined sensors for measuring vehicle motion


    Weitere Titelangaben:

    Betriebssicherheit von Mikrosensoren für die Bestimmung des Bewegungsverhaltens von Fahrzeugen


    Beteiligte:
    Meriheinä, U. (Autor:in)


    Erscheinungsdatum :

    1996


    Format / Umfang :

    24 Seiten, 23 Bilder, 1 Tabelle


    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Silicon micro machined sensors for automotive safety and stability

    Mahon,G.L. / Meriheinae,U. / VTI Hamlin,FI | Kraftfahrwesen | 1997


    Silicon micro machined sensors for automotive safety and stability

    Mahon, G. L. / Meriheinae, U. / Associazione Tecnica dell'Automobile et al. | British Library Conference Proceedings | 1997


    Micro-Machined Micro-Optical Bench for Optoelectronic Packaging

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1994


    Laser-machined fibres as ultraminiature pressure sensors

    Watson, Stuart / Gander, Matthew J. / MacPherson, William N. et al. | SPIE | 2004


    Micro-Machined Integrated Components for Terahertz Frequencies

    Bowen, J. W. / Karatzas, L. S. / Towlson, B. M. et al. | British Library Online Contents | 1996