In this paper it has been shown that the excellent accuracy and reliability of the bulk silicon capacitive technology, proven in the field, have their origin in basic physical phenomena and the mechanical structures of the sensing elements. The simple structures and measurement principles give reliability and easy diagnostics, making this technology most suitable for highly demanding automotive safety critical applications. It has also been shown, that size reduction of the sensing element in the past and in the future give competitiveness in highly cost critical applications. The easy packaging technology results in low cost and small size components for automatic assembly on the customer's PCB. The features listed in this paper have made the silicon capacitive technology a dominant one in automotive applications.
Micro machined sensors for measuring vehicle motion
Betriebssicherheit von Mikrosensoren für die Bestimmung des Bewegungsverhaltens von Fahrzeugen
1996
24 Seiten, 23 Bilder, 1 Tabelle
Aufsatz (Konferenz)
Englisch
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