In the article are represented the analysis of existent methods of nanolithography on the example of nanoimprinting, features of technological processes with the use of nanoimprinting, advantages and lacks of different methods and direction of their application are appraised.


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    Title :

    Nanolithography ߝ nanoimprinting


    Contributors:


    Publication date :

    2007-06-01


    Size :

    4860383 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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