In the article are represented the analysis of existent methods of nanolithography on the example of nanoimprinting, features of technological processes with the use of nanoimprinting, advantages and lacks of different methods and direction of their application are appraised.
Nanolithography ߝ nanoimprinting
01.06.2007
4860383 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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