A novel profilometry using a frequency comb light source is proposed. This method realizes step height measurement without mechanical scanning. We have confirmed the system with high accuracy with this method.


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    Title :

    A Novel Profilometry Using Frequency Comb Light Source


    Contributors:
    Choi, S. (author) / Yamamoto, M. (author) / Moteki, D. (author) / Shioda, T. (author) / Tanaka, Y. (author) / Takeda, M. (author) / Kurokawa, T. (author)


    Publication date :

    2005-01-01


    Size :

    348951 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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