Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.


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    Title :

    Surface structures of femtosecond laser irradiated 4H-SiC crystal


    Contributors:
    Tomita, T. (author) / Kinoshita, K. (author) / Matsuo, S. (author)


    Publication date :

    2005-01-01


    Size :

    538518 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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