Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.


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    Titel :

    Surface structures of femtosecond laser irradiated 4H-SiC crystal


    Beteiligte:
    Tomita, T. (Autor:in) / Kinoshita, K. (Autor:in) / Matsuo, S. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    538518 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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