Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.
Surface structures of femtosecond laser irradiated 4H-SiC crystal
01.01.2005
538518 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Study of textured ZnS irradiated by femtosecond laser pulses
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