We present surface structures formed on silicon after irradiation by large numbers of low-fluence femtosecond laser pulses with wavelengths in the transparency regime of silicon. These structures have periods significantly less than the laser wavelength.
Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 1 ; 3 pp. vol.1
2004-01-01
830435 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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