850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of the Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.15 % across a 3-in diameter wafer was achieved. Also, /spl plusmn/0.1 % Al composition uniformity of Al/sub 0.98/Ga/sub 0.02/As was obtained.


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    Title :

    Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD


    Contributors:
    Jang, H.J. (author) / Song, Y.H. (author) / Jeong, B.J. (author) / Lee, K.H. (author) / Son, J.K. (author) / Lee, Y.H. (author) / Choi, D.G. (author) / Yang, S.S. (author) / Yang, J.W. (author) / Lim, K.Y. (author)


    Publication date :

    2001-01-01


    Size :

    148145 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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