850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of the Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.15 % across a 3-in diameter wafer was achieved. Also, /spl plusmn/0.1 % Al composition uniformity of Al/sub 0.98/Ga/sub 0.02/As was obtained.
Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD
2001-01-01
148145 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Highly Uniform and Reproducible 850nm Vertical-Cavity Surface-Emitting Lasers Grown by MOCVD
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