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    Title :

    Chemical Beam Etching With Monolayer Control


    Contributors:
    Tsang, W.T. (author) / Kapre, R.M. (author) / Chiu, T.H. (author) / Williams, M.D. (author) / Ferguson, J.F. (author)


    Publication date :

    1994-01-01


    Size :

    25840 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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