We propose a new method for reconstitution of submicrometric profile based on the LOFI (Laser Optical Feedback Imaging) technique [E. Lacot, et al., 2002]. We show that this method is equivalent to an optical system with infinite aperture.


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    Title :

    An infinite aperture optical system based on laser optical feedback application to submicrometric profilometry


    Contributors:
    Carminati, F.-R. (author) / Lacot, E. (author) / Hugon, O. (author) / Stoeckel, F. (author)


    Publication date :

    2003-01-01


    Size :

    54124 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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