We propose a new method for reconstitution of submicrometric profile based on the LOFI (Laser Optical Feedback Imaging) technique [E. Lacot, et al., 2002]. We show that this method is equivalent to an optical system with infinite aperture.
An infinite aperture optical system based on laser optical feedback application to submicrometric profilometry
2003-01-01
54124 byte
Conference paper
Electronic Resource
English
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