We propose a new method for reconstitution of submicrometric profile based on the LOFI (Laser Optical Feedback Imaging) technique [E. Lacot, et al., 2002]. We show that this method is equivalent to an optical system with infinite aperture.


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    Titel :

    An infinite aperture optical system based on laser optical feedback application to submicrometric profilometry


    Beteiligte:
    Carminati, F.-R. (Autor:in) / Lacot, E. (Autor:in) / Hugon, O. (Autor:in) / Stoeckel, F. (Autor:in)


    Erscheinungsdatum :

    01.01.2003


    Format / Umfang :

    54124 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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