We propose a new method for reconstitution of submicrometric profile based on the LOFI (Laser Optical Feedback Imaging) technique [E. Lacot, et al., 2002]. We show that this method is equivalent to an optical system with infinite aperture.
An infinite aperture optical system based on laser optical feedback application to submicrometric profilometry
01.01.2003
54124 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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