We demonstrate that extremely thin, i.e., /spl sim/2-3/spl mu/m, single-crystal films of LiNbO/sub 3/ can be formed on a wafer using patterned ion-implantation followed by chemical etching. Control of the membrane thickness and its waveguiding properties are demonstrated.


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    Title :

    Extremely thin, single-crystal films of LiNbO/sub 3/ fabricated using localized He+ ion-implantation


    Contributors:
    Djukic, D. (author) / Izuhara, T. (author) / Roth, R.M. (author) / Osgood, R.M. (author) / Bakhru, S. (author) / Bakhru, H. (author)


    Publication date :

    2005-01-01


    Size :

    1494299 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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