We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in which spatial nonuniformities in the material cause a multi-mode emission pattern.
Near field microscopy of vertical cavity lasers
1995-01-01
479899 byte
Conference paper
Electronic Resource
English
Near Field Microscopy of Vertical Cavity Lasers
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