We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in which spatial nonuniformities in the material cause a multi-mode emission pattern.
Near field microscopy of vertical cavity lasers
01.01.1995
479899 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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