This paper presents the design and the fabrication process for a spatial optical modulator based on curvature modulation using a continuous reflective surface with the voltage induced deformation. The device consists of an interdigitated bottom electrode, a compliant silicone layer (PDMS), and a top electrode. A coupled opto-electro-mechanical simulation was carried out to determine the optimum geometry. As PDMS is not a photo-definable polymer, we used a photoresist mold to obtain the device.


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    Title :

    Silicone polymer based optical modulator - design and fabrication process


    Contributors:
    Cristea, D. (author) / Obreja, P. (author) / Kusko, M. (author) / Moagar-Poladian, V. (author)


    Publication date :

    2005-01-01


    Size :

    843723 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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