This paper presents the design and the fabrication process for a spatial optical modulator based on curvature modulation using a continuous reflective surface with the voltage induced deformation. The device consists of an interdigitated bottom electrode, a compliant silicone layer (PDMS), and a top electrode. A coupled opto-electro-mechanical simulation was carried out to determine the optimum geometry. As PDMS is not a photo-definable polymer, we used a photoresist mold to obtain the device.


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    Titel :

    Silicone polymer based optical modulator - design and fabrication process


    Beteiligte:
    Cristea, D. (Autor:in) / Obreja, P. (Autor:in) / Kusko, M. (Autor:in) / Moagar-Poladian, V. (Autor:in)


    Erscheinungsdatum :

    01.01.2005


    Format / Umfang :

    843723 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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