We present single mode surface emitting quantum cascade lasers (QCLs). Efficient surface emission of QCLs is obtained by a second-order surface grating. More complicated structures, e.g. photonic crystals, require very high aspect ratio dry etching. We provide a short overview of chlorine based plasma etching and discuss the limitations on accuracy and the impact of different process parameters on etch profiles and depths.
Surface emitting quantum cascade lasers
2004-01-01
123817 byte
Conference paper
Electronic Resource
English
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