We present single mode surface emitting quantum cascade lasers (QCLs). Efficient surface emission of QCLs is obtained by a second-order surface grating. More complicated structures, e.g. photonic crystals, require very high aspect ratio dry etching. We provide a short overview of chlorine based plasma etching and discuss the limitations on accuracy and the impact of different process parameters on etch profiles and depths.


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    Title :

    Surface emitting quantum cascade lasers


    Contributors:
    Pflugl, C. (author) / Golka, S. (author) / Austerer, M. (author) / Schrenk, W. (author) / Andrews, A.M. (author) / Strasser, G. (author)


    Publication date :

    2004-01-01


    Size :

    123817 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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