We present single mode surface emitting quantum cascade lasers (QCLs). Efficient surface emission of QCLs is obtained by a second-order surface grating. More complicated structures, e.g. photonic crystals, require very high aspect ratio dry etching. We provide a short overview of chlorine based plasma etching and discuss the limitations on accuracy and the impact of different process parameters on etch profiles and depths.


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    Titel :

    Surface emitting quantum cascade lasers


    Beteiligte:
    Pflugl, C. (Autor:in) / Golka, S. (Autor:in) / Austerer, M. (Autor:in) / Schrenk, W. (Autor:in) / Andrews, A.M. (Autor:in) / Strasser, G. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    123817 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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