A spectral interference microscope using a superluminescent diode as light source and a liquid-crystal Fabry-Perot etalon as a frequency tunable device is developed for three-dimensional imaging micro-profilometry. By changing the current to the superluminescent diode, constant light input to the interferometer was achieved throughout the measurement. A high speed Fourier transform technique was developed for analysis of the data. It takes few seconds to measure the three-dimensional absolute height distribution of a discontinuous object. Experimental results with improved resolution and speed of measurement are presented.
Spectral interferometric technique for 3D-shape measurement of microscopic objects with improved resolution, speed of measurement and signal processing
2001-01-01
168581 byte
Conference paper
Electronic Resource
English
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