A spectral interference microscope using a superluminescent diode as light source and a liquid-crystal Fabry-Perot etalon as a frequency tunable device is developed for three-dimensional imaging micro-profilometry. By changing the current to the superluminescent diode, constant light input to the interferometer was achieved throughout the measurement. A high speed Fourier transform technique was developed for analysis of the data. It takes few seconds to measure the three-dimensional absolute height distribution of a discontinuous object. Experimental results with improved resolution and speed of measurement are presented.


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    Title :

    Spectral interferometric technique for 3D-shape measurement of microscopic objects with improved resolution, speed of measurement and signal processing


    Contributors:
    Mehta, D.S. (author) / Sugai, M. (author) / Hinosugi, H. (author) / Saito, S. (author) / Takeda, M. (author) / Kurokawa, T. (author) / Takahashi, H. (author) / Ando, M. (author) / Shishido, M. (author) / Yoshizawa, T. (author)


    Publication date :

    2001-01-01


    Size :

    168581 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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