A spectral interference microscope using a superluminescent diode as light source and a liquid-crystal Fabry-Perot etalon as a frequency tunable device is developed for three-dimensional imaging micro-profilometry. By changing the current to the superluminescent diode, constant light input to the interferometer was achieved throughout the measurement. A high speed Fourier transform technique was developed for analysis of the data. It takes few seconds to measure the three-dimensional absolute height distribution of a discontinuous object. Experimental results with improved resolution and speed of measurement are presented.


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    Titel :

    Spectral interferometric technique for 3D-shape measurement of microscopic objects with improved resolution, speed of measurement and signal processing


    Beteiligte:
    Mehta, D.S. (Autor:in) / Sugai, M. (Autor:in) / Hinosugi, H. (Autor:in) / Saito, S. (Autor:in) / Takeda, M. (Autor:in) / Kurokawa, T. (Autor:in) / Takahashi, H. (Autor:in) / Ando, M. (Autor:in) / Shishido, M. (Autor:in) / Yoshizawa, T. (Autor:in)


    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    168581 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




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