In this paper, fabrication of microdischarge arrays in metal/polymer/metal structures having a total thickness of 30 -100 /spl mu/m is reported. Microcavities 30-100 /spl mu/m in diameter are formed by laser microdrilling or a chemical etching process. All of the fabrication procedures have been designed to be compatible with roll-to-roll processing.


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    Title :

    Flexible microdischarge arrays:large scale fabrication and AC operation


    Contributors:


    Publication date :

    2004-01-01


    Size :

    92236 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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