In this paper, fabrication of microdischarge arrays in metal/polymer/metal structures having a total thickness of 30 -100 /spl mu/m is reported. Microcavities 30-100 /spl mu/m in diameter are formed by laser microdrilling or a chemical etching process. All of the fabrication procedures have been designed to be compatible with roll-to-roll processing.
Flexible microdischarge arrays:large scale fabrication and AC operation
2004-01-01
92236 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Flexible Microdischarge Arrays: Large Scale Fabrication and AC Operation
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