In this paper, fabrication of microdischarge arrays in metal/polymer/metal structures having a total thickness of 30 -100 /spl mu/m is reported. Microcavities 30-100 /spl mu/m in diameter are formed by laser microdrilling or a chemical etching process. All of the fabrication procedures have been designed to be compatible with roll-to-roll processing.


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    Titel :

    Flexible microdischarge arrays:large scale fabrication and AC operation


    Beteiligte:
    Sung-Jin Park, (Autor:in) / Kuo-Feng Chen, (Autor:in) / Eden, J.G. (Autor:in)


    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    92236 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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