In this paper, the design and performance of novel AC type silicon microdischarge devices and arrays. We have fabricated, by MEMS and VLSI fabrication processes, microdischarge devices having cavity widths in the 10 -100 /spl mu/m range and incorporating a metal/dielectrics/Si structure.


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    Titel :

    Large scale arrays of microdischarge devices fabricated in Si


    Beteiligte:
    Sung-Jin Park, (Autor:in) / Kuo-Feng Chen, (Autor:in) / Eden, J.G. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    86263 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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