In this paper, we present a process for fabricating Copper (Cu) nanotubes, which can be utilized for novel electrical interconnect materials. Because of superior properties in electromigration and thermal management to aluminum, Cu technology has been attractive to the semiconductor industry. Cu nanotubes can be fabricated by electrodeposition using alumina nanopore templates. Nanotubes can provide high surface-to-volume ratio in nanostructures compared to nanorods. In addition, nanotubes provide lower resistively and high thermal conductivity. Cu nanotube arrays were electrodeposited into alumina nanopore membranes with pore diameters of approximately 30nm and 50nm, with estimated porosity of 43%, by nano template-based electrodeposition.
Copper Nanotubes for Packaging Applications
2008-03-01
1572188 byte
Conference paper
Electronic Resource
English
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