Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.


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    Title :

    Laser microfabrication of photoresist rod array using a microlens array


    Contributors:
    Matsuo, S. (author) / Miyamoto, T. (author) / Tomita, T. (author)


    Publication date :

    2005-01-01


    Size :

    207587 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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