We report the realization of an infrared 3D photonic crystal built directly on a Si-wafer. Our 3D crystal shows a large photonic stop band from 10 to 14.5 /spl mu/m along the <100> crystallographic direction, a strong attenuation constant of -12 dB per unit cell, and a spectral response uniformity to better than 1% over a 6 inch Si wafer. This demonstration opens the door for Si-based photonic crystal devices that are compatible with the well-developed Si microelectronics processes and is suitable for large scale photonic integration.
A three-dimensional silicon photonic crystal
1998-01-01
267336 byte
Conference paper
Electronic Resource
English
A Three-Dimensional Silicon Photonic Crystal
British Library Conference Proceedings | 1998
|A Three-Dimensional Optical Photonic Crystal
British Library Online Contents | 1999
|Three-Dimensional Superprism Effect in Photonic-Crystal Slabs
British Library Online Contents | 2004
|Highly-Confined Waveguides in Three-Dimensional Photonic Crystal
British Library Conference Proceedings | 1999
|