To realize the nanophotonic device required by future systems, we demonstrated the feasibility of nanometer-scale optical chemical vapor deposition using optical near-field techniques. Furthermore, the possibilities of self-assembling integration using optical near-field were also presented.
Fabrication of nanophotonic devices and their integration by optical near-field
2005-01-01
253669 byte
Conference paper
Electronic Resource
English
ThD1 Nanophotonic Materials and Devices for Optical System Integration
British Library Conference Proceedings | 2002
|