To realize the nanophotonic device required by future systems, we demonstrated the feasibility of nanometer-scale optical chemical vapor deposition using optical near-field techniques. Furthermore, the possibilities of self-assembling integration using optical near-field were also presented.


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    Titel :

    Fabrication of nanophotonic devices and their integration by optical near-field


    Beteiligte:
    Yatsui, T. (Autor:in) / Ohtsu, M. (Autor:in)


    Erscheinungsdatum :

    01.01.2005


    Format / Umfang :

    253669 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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