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    Title :

    Characterization of microdefects and microroughness in silicon wafers by a Rayleigh-Brillouin scatte


    Contributors:
    Lu Taijing, (author) / Ng, S.C. (author)


    Publication date :

    1995-01-01


    Size :

    167805 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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