The ArF excimer laser has the shortest wavelength (193 nm) among discharge-pumped rare-gas halide excimer lasers, and is attracting much attention. In the ArF discharge plasma, many particles (Ar*, He*, Ar/sup +/, Ar/sub 2//sup +/, F/sup -/, electron and so on) influence the laser performance. A possible channel of ArF* excimer formation is the three-body ion-ion recombination process. The purpose of this study is to measure the time dependences of the F/sup -/ ion density in an ArF laser plasma and clarify the role of F/sup -/ ions in the ArF* excitation mechanisms. The peak number density was measured to be 0.93 /spl times/ 10/sup 15/ cm/sup -3/. The effects of F/sup -/ ions on the ArF laser excitation mechanisms are discussed and it is found experimentally that the F/sup -/ ions have a significant influence on the light amplification process due to laser absorption.


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    Title :

    Measurements of F/sup -/ ion density in a discharge-pumped ArF excimer laser plasma


    Contributors:
    Nagai, S. (author) / Sakai, M. (author) / Kono, A. (author) / Goto, T. (author) / Furuhashi, H. (author) / Win, N. (author) / Uchida, Y. (author)


    Publication date :

    1996-01-01


    Size :

    149672 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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