Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    MP3 Discharge Pumped VUV Rare-Gas Excimer Laser


    Contributors:

    Conference:

    Annual meeting, IEEE Lasers & Electro-optics Society ; 2002 ; Glasgow



    Publication date :

    2002-01-01


    Size :

    4 pages


    Remarks:

    IEEE cat. no. 02CH37369




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Discharge pumped VUV rare-gas excimer laser

    Kubodera, S. / Higashiguchi, T. / Sasaki, W. | IEEE | 2002




    Theoretical studies on energy loss processes in a discharge-pumped ArF excimer laser

    Furuhashi, H. / Yamada, J. / Uchida, Y. et al. | British Library Conference Proceedings | 1999


    Measurement of F- Ion Density in a Discharge-Pumped ArF Excimer Laser Plasma

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1996