An angular rate-sensing scheme for z-axis MEMS oscillatory gyroscopes, which is based on observer-based adaptive control, is presented. The proposed observer based adaptive control scheme estimates the component of the angular velocity vector (z-axis), which is orthogonal to the plane of oscillation of the gyroscope, as well as compensates friction forces, and fabrication imperfections, which cause model parameter variations and the presence of off-diagonal terms in the system's stiffness and damping matrix. The convergence and resolution analysis presented in this paper shows that the proposed observer-based adaptive controlled scheme offer several advantages over conventional open-loop and closed-loop sensing strategies, including a larger operational bandwidth, producing no zero-rate output, the ability of self-calibration and a large robustness to parameter variations cause by fabrication defects and ambient conditions.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Adaptive controller design of MEMS gyroscopes


    Contributors:
    Sungsu Park, (author) / Horowitz, R. (author) / Chin-Woo Tan, (author)


    Publication date :

    2001-01-01


    Size :

    615511 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Adaptive Controller Design of MEMS Gyroscopes

    Park, S. / Horowitz, R. / Tan, C. et al. | British Library Conference Proceedings | 2001


    MEMS gyroscopes for automotive applications

    Classen, J. / Frey, J. / Kuhlmann, B. et al. | Tema Archive | 2007


    MEMS Gyroscopes for Automotive Applications

    Classen, J. / Frey, J. / Kuhlmann, B. et al. | British Library Conference Proceedings | 2007


    Design of an AGC Driving Loop in MEMS Gyroscopes

    Sung, W.-T. / Hyun, C. / Lee, J.G. et al. | British Library Conference Proceedings | 2008


    Design of an AGC Driving Loop in MEMS Gyroscopes

    Sung, W.-T. | Online Contents | 2007