An angular rate-sensing scheme for z-axis MEMS oscillatory gyroscopes, which is based on observer-based adaptive control, is presented. The proposed observer based adaptive control scheme estimates the component of the angular velocity vector (z-axis), which is orthogonal to the plane of oscillation of the gyroscope, as well as compensates friction forces, and fabrication imperfections, which cause model parameter variations and the presence of off-diagonal terms in the system's stiffness and damping matrix. The convergence and resolution analysis presented in this paper shows that the proposed observer-based adaptive controlled scheme offer several advantages over conventional open-loop and closed-loop sensing strategies, including a larger operational bandwidth, producing no zero-rate output, the ability of self-calibration and a large robustness to parameter variations cause by fabrication defects and ambient conditions.
Adaptive controller design of MEMS gyroscopes
01.01.2001
615511 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Adaptive Controller Design of MEMS Gyroscopes
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