An angular rate-sensing scheme for z-axis MEMS oscillatory gyroscopes, which is based on observer-based adaptive control, is presented. The proposed observer based adaptive control scheme estimates the component of the angular velocity vector (z-axis), which is orthogonal to the plane of oscillation of the gyroscope, as well as compensates friction forces, and fabrication imperfections, which cause model parameter variations and the presence of off-diagonal terms in the system's stiffness and damping matrix. The convergence and resolution analysis presented in this paper shows that the proposed observer-based adaptive controlled scheme offer several advantages over conventional open-loop and closed-loop sensing strategies, including a larger operational bandwidth, producing no zero-rate output, the ability of self-calibration and a large robustness to parameter variations cause by fabrication defects and ambient conditions.


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    Titel :

    Adaptive controller design of MEMS gyroscopes


    Beteiligte:
    Sungsu Park, (Autor:in) / Horowitz, R. (Autor:in) / Chin-Woo Tan, (Autor:in)


    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    615511 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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